The use of nanosecond laser pulses to assess the residual stresses of thin films
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Abstract
The laser spallation technique was applied for measurement of residual stress of thin films. Two films of different properties, ductile and soft Ti, and hard and brittle TiN, were studied. The films were produced on 304 steel substrate by PVD method. The residual stress value obtained by laser spallation technique LST were compared with stress value from X-ray diffraction method. Good agreement of stress values measured by both methods was attained. It was shown that shock wave induced by a nanosecond laser pulse adequately determines properties of PVD thin films on metal substrate.
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